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DRY HYDROGEN PLASMA CLEANING FOR LOCAL EPITAXIAL GROWTH

Author(s):
Ramm, Juergen
Beck, Eugen
Eisele, Ignaz
Hansch, Walter
Klepser, Bernd-Ulrich
Senn, Hans
1 more
Publication title:
Surface chemical cleaning and passivation for semiconductor processing
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
315
Pub. date:
1993
Page(from):
91
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992139 [1558992138]
Language:
English
Call no.:
M23500/315
Type:
Conference Proceedings

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