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NEW WET CLEANING STRATEGIES FOR OBTAINING HIGHLY RELIABLE THIN OXIDES

Author(s):
Heyns, M. M.
Verhaverbeke, S.
Meuris, M.
Mertens, P. W.
Schmidt, H.
Kubota, M.
Philipossian, A.
Dillenbeck, K.
Graf, D.
Schnegg, A.
Blank, R. de
6 more
Publication title:
Surface chemical cleaning and passivation for semiconductor processing
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
315
Pub. Year:
1993
Page(from):
35
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992139 [1558992138]
Language:
English
Call no.:
M23500/315
Type:
Conference Proceedings

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