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Mechanical Properties of TiN Thin Films Measured Using Nanoindentation and Bulge Test

Author(s):
Publication title:
Fundamentals of nanoindentation and nanotribology : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
522
Pub. Year:
1998
Page(from):
245
Pub. info.:
Warrendale, Penn.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994287 [1558994289]
Language:
English
Call no.:
M23500/522
Type:
Conference Proceedings

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