Blank Cover Image

GaN Etching in BCl3/Cl2 Plasmas

Author(s):
Shul, R. J.
Ashby, C. I. H.
Willison, C. G.
Zhang, L.
Han, J.
Bridges, M. M.
Pearton, S. J.
Lee, J. W.
Lester, L. F.
4 more
Publication title:
Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
512
Pub. date:
1998
Page(from):
487
Pub. info.:
Warrendale, Penn.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994188 [1558994181]
Language:
English
Call no.:
M23500/512
Type:
Conference Proceedings

Similar Items:

Shul, R. J., Zhang, L., Willison, C. G., Han, J., Pearton, S. J., Hong, J., Abernathy, C. R., Lester, L. F.

MRS - Materials Research Society

Shul, R. J., Willison, C. G., Bridges, M. M., Han, J., Lee, J. W., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., …

MRS - Materials Research Society

Shul, R., Zhang, L, Baca, A., Han, J., Crawford, M., Willison, C., Pearton, S., Ren, F., Zolper, J., Lester, L.

Electrochemical Society

Pearton, S. J., Vartuli, C. B., Lee, J. W., Donovan, S. M., MacKenzie, J. D., Abernathy, C. R., Shul, R. J., McLane, G. …

MRS - Materials Research Society

Shul, R. J., Briggs, R. D., Han, J., Pearton, S. J., Lee, J. W., Vartuli, C. B., Killeen, K. P., Ludowise, M. J.

MRS - Materials Research Society

Shul, R. J., Vawter, G. A., Willison, C. G., Bridges, M. M., Lee, J. W., Pearton, S. J., Abernathy, C. R.

MRS - Materials Research Society

Shul, R.J., Zhang, L., Baca, A.G., Willison, C.G., Han, J., Pearton, S.J., Ren, F., Zolper, J.C., Lester, L.F.

Materials Research Society

Lee, J. W., Pearton, S. J., Abernathy, C. R., Vawter, G. A., Shul, R. J., Bridges, M. M., Willison, C. G.

MRS - Materials Research Society

Shul, R. J., Baca, A. G., Rieger, D. J., Hou, H., Pearton, S. J., Ren, F.

MRS - Materials Research Society

Shul, R. J., Ashby, C. I. H., Rieger, D. J., Howard, A. J., Pearton, S. J., Abernathy, C. R., Vartuli, C. B., Barnes, P. …

MRS - Materials Research Society

Shul, Randy J., Zhang, L., Baca, A.G., Willison, Christi G., Hans, J., Pearton, S.J., Lee, K.P., Ren, F.

Materials Research Society

Zhang, L., Lester, L. F., Baca, A. G., Shul, R. J., Chang, P. C., Willison, C. G., Mishra, U. K., DenBaars, S. P., …

MRS-Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12