Reactive Ion Etching of Boron Nitride and Gallium Nitride Materials in Cl2/Ar and BCl3/Cl2/Ar Chemistries
- Author(s):
Medelci, N. Tempez, A. Kim, E. Badi, N. Starikov, D. Berichev, I. Bensaoula, A. - Publication title:
- Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 512
- Pub. Year:
- 1998
- Page(from):
- 285
- Pub. info.:
- Warrendale, Penn.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994188 [1558994181]
- Language:
- English
- Call no.:
- M23500/512
- Type:
- Conference Proceedings
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