In Situ FTIR Spectroscopic Detection of Absorbed Species on Sapphire Substrates in a Diamond ECR-PACVD System

In Situ FTIR Spectroscopic Detection of Absorbed Species on Sapphire Substrates in a Diamond ECR-PACVD System

Author(s):

Publication title:

In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

502

Pub. Year:

1998

Page(from):

269

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994072 [1558994076]

Language:

English

Call no.:

M23500/502

Type:

Conference Proceedings

Details

TDL ID:	ZA00017996
Series ID:	PA00000011
Conf. info. (Name):	Symposium on in situ process diagnostics and intelligent materials processing
Conf. info. (Number):	1997
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1997.12.02-1997.12.05

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