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Recent Progress in Implantation and Annealing of GaN and AlGaN

Author(s):
Zolper, J. C.
Han, J.
Deusen, S. B. Van
Crawford, M. H.
Biefeld, R. M.
Jun, J.
Suski, T.
Baranowski, J. M.
Pearton, S. J.
4 more
Publication title:
Nitride semiconductors : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
482
Pub. date:
1998
Page(from):
979
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993877 [1558993878]
Language:
English
Call no.:
M23500/482
Type:
Conference Proceedings

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