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In Situ RHEED-TRAXS Monitoring Alloy Composition of the Surface During RF-MBE Growth of GAlnN and AlGaN

Author(s):
Ito, A.
Sakai, H.
Inagaki, M.
Nomura, G.
Nakamura, Y.
Yasuda, T.
Amano, H.
Akasaki, I.
3 more
Publication title:
Nitride semiconductors : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
482
Pub. Year:
1998
Page(from):
441
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993877 [1558993878]
Language:
English
Call no.:
M23500/482
Type:
Conference Proceedings

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