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Growth Mechanism and Structure of AIN Films Grown on Sapphire by MOCVD

Author(s):
Li, Yun-Xin
Salamanca-Riba, L.
Wongchotigul, K.
Zhou, P.
Spencer, M. G.
Jones, V. K.
1 more
Publication title:
Nitride semiconductors : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
482
Pub. date:
1998
Page(from):
137
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993877 [1558993878]
Language:
English
Call no.:
M23500/482
Type:
Conference Proceedings

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