Compositional Effects on the Degradation of PVD-TiSiN
- Author(s):
- Publication title:
- Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 472
- Pub. Year:
- 1997
- Page(from):
- 325
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993761 [1558993762]
- Language:
- English
- Call no.:
- M23500/472
- Type:
- Conference Proceedings
Similar Items:
MRS - Materials Research Society |
Society of Vacuum Coaters |
2
Conference Proceedings
Effect of Oxygen on the Degradation of Ti-Si-N Diffusion Barriers in Cu Metallization
MRS - Materials Research Society |
MRS-Materials Research Society |
3
Conference Proceedings
Structural and Electrical Characterization of Si-Implanted TiN as a Diffusion Barrier for Cu Metallization
MRS - Materials Research Society |
MRS - Materials Research Society |
4
Conference Proceedings
Structural and Magnetic Characterization of Bi-Substituted Garnet on Si and GaAs
MRS - Materials Research Society |
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
The effects of chemical gradients and photoresist composition on lithographically generated line edge roughness
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Light induced degradation in amorphous silicon photodiodes and implication for diagnostic medical imaging application [6142-102]
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
THE EFFECT OF SUBSTRATE SURFACE ORIENTATION AND EPILAYER THICKNESS ON InGaAs./GaAs EPILAYER TILT AND TILT DIRECTION
Materials Research Society |