Microstructural Observations of LPCVD Double Layer Polysilicon Thin Film Tensile Specimens
- Author(s):
- Publication title:
- Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 472
- Pub. Year:
- 1997
- Page(from):
- 275
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993761 [1558993762]
- Language:
- English
- Call no.:
- M23500/472
- Type:
- Conference Proceedings
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