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Sub-Half Micron Elevated Source/Drain NMOSFETS by Low Temperature Selective Epitaxial Deposition

Author(s):
Sun, J.
Bartholomew, R. F.
Bellur, K.
O'Neil, P. A.
Srivastava, A.
Violette, K. E.
Ozturk, M. C.
Osburn, C. M.
Masnari, N. A.
4 more
Publication title:
Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
429
Pub. date:
1996
Page(from):
343
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993327 [1558993320]
Language:
English
Call no.:
M23500/429
Type:
Conference Proceedings

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