Evaluation of Applied Materials' Rapid Thermal Processor Using SEMATECH Methodologies for 0.25 ヲフm Technology Thermal Applications-Part I
- Author(s):
Riley, Terrance J. Nanda, Arun K. Miner, Gary Pas, Michael F. Hossain-Pas, Sylvia Velo, Lino A. - Publication title:
- Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 429
- Pub. Year:
- 1996
- Page(from):
- 15
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993327 [1558993320]
- Language:
- English
- Call no.:
- M23500/429
- Type:
- Conference Proceedings
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