Blank Cover Image

DIFFUSION BEHAVIOR OF B-, As- AND Sb-DOPANTS IN THIN EPITAXIAL LAYERS

Author(s):
Publication title:
Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
358
Pub. Year:
1995
Page(from):
945
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992597 [1558992596]
Language:
English
Call no.:
M23500/358
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings OXIDATION ENHANCED DOPANT DIFFUSION IN THIN SOI FILMS

Crowder, S.W., Griffin, P.B., Plummer, J.D.

Electrochemical Society
7 Conference Proceedings Transient-Enhanced Diffusion of Dopants in Preamorphized Si Layers

Claverie, A., Bonafos, C., Omri, M., Mauduit, B. de, Assayag, G. Ben, Martinez, A., Alquier, D., Mathiot, D.

MRS - Materials Research Society
2 Conference Proceedings Shallow dopants and the role of hydrogen in epitaxial layers of Gallium Nitride (GaN)

Gotz, W., Johson, N.M., Bour, D.P., Chen, C., Liu, H., Imler, W.

Electrochemical Society
8 Conference Proceedings NON-ALLOYED OHMIC CONTACTS TO n-GaAs USING EPITAXIAL Ge LAYERS

Sawada, T., Chen, W.X., Marshall, E.D., Kavanagh, K.L., Kuech, T.F., Pai, C.S., Lau, S.S.

Materials Research Society
3 Conference Proceedings Dopant Diffusion in SiGeC Alloys

H. Rucker, B. Heinemann, R. Kurps, Y. Yamamoto

Electrochemical Society
9 Conference Proceedings Optimization of Pre-Amorphization and Dopant Implant Conditions for Advanced Annealing

Felch, S.B., Graoui, H., Mayur, A.

Electrochemical Society
4 Conference Proceedings Epitaxial Ferroelectric BaTiO3 Thin Films for Microphotonic Applications

Niu, F., Teren, A. R., Hoerman, B. H., Wessels, B. W.

Materials Research Society
10 Conference Proceedings Process Simulation of Dopant Atom Diffusion in SiO2

Fair, R.B., Richards, W.

Electrochemical Society
5 Conference Proceedings Single poly PMOS-based CMOS-compatible low voltage OTP

Vega-Castillo, P., Krautschneider, W. H.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings High-power diffusion-bonded walk-off-compensated KTP OPO

Wu, R., Lai, K. S., Wong, H. F., Lau, E., Lim, Y. L., Xie, W.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Transient-Enhanced Diffusion of Dopants in Preamorphized Si Layers

Claverie, A., Bonafos, C., Omri, M., Mauduit, B. de, Assayag, G. Ben, Martinez, A., Alquier, D., Mathiot, D.

MRS - Materials Research Society
12 Conference Proceedings Optical Properties of Highly Excited ZnTe Epitaxial Layers

Majumder, F.A., Kalt, H., Klingshiin, C., Wagner, H.P., Gebhardt, W.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12