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STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF UNDOPED POLY-Si OXIDES

Author(s):
Sakamoto, T.
Tokioka, H.
Takanabe, S.
Kubota, T.
Niwano, Y.
Goto, Y.
Namizaki, H.
Wada, O.
Kurokawa, H.
4 more
Publication title:
Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
358
Pub. Year:
1995
Page(from):
933
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992597 [1558992596]
Language:
English
Call no.:
M23500/358
Type:
Conference Proceedings

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