Blank Cover Image

EARLY STAGE OF POLYCRYSTALLINE GROWTH OF Ge AND SiGe BY REACTIVE THERMAL CVD FROM GeF4 AND Si2H6

Author(s):
Publication title:
Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
358
Pub. Year:
1995
Page(from):
877
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992597 [1558992596]
Language:
English
Call no.:
M23500/358
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Direct Nucleation and Selective Growth of Nuclei for High Crystallinity Poly-SiGe Thin Films on SiO2 Substrates

Hanna, Jun-Ichi, Shiota, Kunihiro, Yamamoto, Masaji

MRS - Materials Research Society
7 Conference Proceedings Growth and Characterization of Poly-SiGe Prepared by Reactive Thermal CVD

Zhang, Jianjun, Shimizu, Kousaku, Hama, Jun-ichi

Materials Research Society
2 Conference Proceedings Mechanisms of Polycrystalline Growth of SiGe in Thermal CVD Processes using Si2H6 and GeF4

A. Kagatsume, I. Suzumura, M. Wakagi, J. Hanna

Electrochemical Society
8 Conference Proceedings Preparation of SiGe Crystalline Thin Films by 'Reactive Thermal CVD'

Yamamoto, M., Hanna, J.

Electrochemical Society
3 Conference Proceedings Ge Thermal CVD Process in GeF4-Si2H6 System

Yamamoto, M., Hanna, J.-I.

Electrochemical Society
9 Conference Proceedings Low Temperature Growth of Polycrystalline Film of Silicon-Rich Silicon-Germanium by Reactive Thermal Chemical Vapor Deposition

Shimizu, Kousaku, Zhang, Jianjun, Lee, Jeong-woo, Hanna, Jun-ichi

Materials Research Society
4 Conference Proceedings Low-Temperature Growth of Poly-Si and SiGe Thin Films by Reactive Thermal CVD and Fabrication of High Mobility TFTs Over 50 cm2/Vs

Hanna, Jun-ichi, Shimizu, Kousaku

Materials Research Society
10 Conference Proceedings Fabrication and Characteriztion of Polycrystalline Silicon Thin Films by Reactive Thermal CVD with Si_2H_6 and F_2

Lee, J.W., Shimizu, K., Hanna, J.

Materials Research Society
5 Conference Proceedings Growth of High-Quality Poly-SiGe on Glass Substrates

Shiota, Kunihiro, Inoue, Daisuke, Minami, Kouichirou, Yamamoto, Masaji, Hanna, Jun-ichi

MRS - Materials Research Society
11 Conference Proceedings Charge Carrier Lifetimes in a Smectic Liquid Crystalline Photoconductor of a 2-phenylnaphthalene Derivative

Iino, Hiroaki, Hanna, Jun-ichi

Materials Research Society
6 Conference Proceedings EARLY STAGE IN POLYCRYSTALLINE GROWTH OF Si BY FLUORO OXIDATION OF SILANE

Endo, Kenji, Bunyo, Masahiro, Shimizu, Isamu, Hanna, Jun-Ichi

Materials Research Society
12 Conference Proceedings Growth of La2-xSrxCuO4 and La2CuO4+ｦﾄ Thin-Films by Reactive Coevaporation

Sato, H., Yamamoto, H., Naito, M.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12