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CLEANING DURING INITIAL STAGES OF EPITAXIAL GROWTH IN AN ULTRA-HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR

Author(s):
Sanganeria, Mahesh K.
Violette, Katherine E.
Ozturk, Mehmet C.
Harris, Gari
Lee, C. Archie
Maher, Dennis M.
1 more
Publication title:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
334
Pub. Year:
1994
Page(from):
463
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992337 [1558992332]
Language:
English
Call no.:
M23500/334
Type:
Conference Proceedings

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