
NEW DRY-ETCH CHEMISTRIES FOR III-V SEMICONDUCTORS
- Author(s):
Pearton, S. J. Chakrabarti, U. K. Ren, F. Abernathy, C. R. Katz, A. Hobson, W. S. Constantine, C. - Publication title:
- Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 334
- Pub. Year:
- 1994
- Page(from):
- 399
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992337 [1558992332]
- Language:
- English
- Call no.:
- M23500/334
- Type:
- Conference Proceedings
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