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ECR PLASMA ENHANCED MOCVD OF TITANIUM NITRIDE

Author(s):
Gross, M. E.
Weber, A.
Nikulski, R.
Klages, C. -P.
Charatan, R. M.
Brown, W. L.
Dons, E.
Eaglesham, D. J.
3 more
Publication title:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
334
Pub. Year:
1994
Page(from):
323
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992337 [1558992332]
Language:
English
Call no.:
M23500/334
Type:
Conference Proceedings

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