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Enhanced hydrogenation in polycrystalline Si thin films using ultrasound treatment

Author(s):
Publication title:
Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3014
Pub. date:
1997
Page(from):
176
Page(to):
183
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424259 [0819424250]
Language:
English
Call no.:
P63600/3014
Type:
Conference Proceedings

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