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Single-shot excimer laser annealing of PECVD amorphous silicon

Author(s):
Boher,P. ( SOPRA SA )
Zahorski,D.
Prochasson,S.
Godard,B.
Stehle,J.L.
Suzuki,Y.
Iwasaki,A.
2 more
Publication title:
International Symposium on Polarization Analysis and Applications to Device Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2873
Pub. Year:
1996
Page(from):
290
Page(to):
293
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422712 [0819422711]
Language:
English
Call no.:
P63600/2873
Type:
Conference Proceedings

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