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Recent progress in repair accuracy of the focused ion-beam mask repair system

Author(s):
Aita,K. ( Seiko Instruments Inc. )
Yasaka,A.
Kitamura,T.
Matsumura,H.
Satoh,Y.
Nakamura,H.
Fujikawa,J.
Tsuchiya,K.
Noguchi,S.
4 more
Publication title:
Photomask and X-Ray Mask Technology III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2793
Pub. Year:
1996
Page(from):
324
Page(to):
335
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421791 [0819421790]
Language:
English
Call no.:
P63600/2793
Type:
Conference Proceedings

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