Blank Cover Image

Development of advanced process for halftone phase-shift mask fabrication with electron-beam exposure systems

Author(s):
Publication title:
Photomask and X-Ray Mask Technology III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2793
Pub. date:
1996
Page(from):
115
Page(to):
126
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421791 [0819421790]
Language:
English
Call no.:
P63600/2793
Type:
Conference Proceedings

Similar Items:

M. Kurihara, M. Komada, H. Moro-oka, N. Hayashi, H. Sano

Society of Photo-optical Instrumentation Engineers

Sasaki,S., Yokoyama,T., Kurihara,M., Miyashita,H., Hayashi,N., Sano,H.

SPIE - The International Society for Optical Engineering

T. Abe, T. Adachi, S. Sasaki, H. Mohri, N. Hayashi

Society of Photo-optical Instrumentation Engineers

Mikami,K., Mohri,H., Itoh,N., Miyashita,H., Hayashi,N., Sano,H.

SPIE-The International Society for Optical Engineering

Tamura,K., Niwa,H., Kanetsuki,S., Asani,M., Mitamura,S., Okuno,D., Kurihara,M., Hayshi,N.

SPIE-The International Society for Optical Engineering

Maetoko, K., Tange, K., Fukuma, H., Yoshioka, N., Kawada, S., Ishizuka, M., Sasaki, T., Sauer, C. A.

SPIE - The International Society of Optical Engineering

Suda,H., Mitsui,N., Nozawa,O., Ohtsuka,H., Takeuchi,M., Nishida,N., Ohkubo,Y., Ushida,M.

SPIE - The International Society for Optical Engineering

Abe, T., Fujii, A., Sasaki, S., Mohri, H., Hayashi, N., Shoki, T., Yamada, T., Nozawa, O., Ohkubo, R., Ushida, M.

SPIE - The International Society of Optical Engineering

Tanaka, Y., Nishiyama, I., Abe, T., Sasaki, S., Hayashi, N.

SPIE - The International Society of Optical Engineering

Hosono, K., Ishikawa, N., Asai, S., Maruyama, H., Miyahara, Y., Sasaki, S., Yamashita, Y., Hotta, Y., Furukawa, T., …

SPIE-The International Society for Optical Engineering

Abe, T., Nishiguchi, M., Amano, T., Motonaga, T., Sasaki, S., Mohri, H., Hayashi, N., Tanaka, Y., Yamanashi, H., …

SPIE - The International Society of Optical Engineering

Matsumoto,M., Abe,T., Yokoyama,T., Miyashita,H., Hayashi,N., Sano,H.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12