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Fabrication of dense contact patterns using halftone phase-shifting mask with off-axis illumination

Author(s):
Kim,H.-J. ( Samsung Electronics Co.,Ltd. )
Kye,J.-W.
Lee,D.-Y.
Woo,S.-G.
Kang,H.-Y.
Koh,Y.-B.
1 more
Publication title:
Photomask and X-Ray Mask Technology III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2793
Pub. Year:
1996
Page(from):
106
Page(to):
114
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421791 [0819421790]
Language:
English
Call no.:
P63600/2793
Type:
Conference Proceedings

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