Multiaxis microcoil sensors in standard CMOS
- Author(s):
- Eyre,B. ( Univ.of California/Los Angeles )
- Pister,K.S.J.
- Gekelman,W.
- Publication title:
- Micromachined Devices and Components
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2642
- Pub. Year:
- 1995
- Page(from):
- 183
- Page(to):
- 191
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420084 [0819420085]
- Language:
- English
- Call no.:
- P63600/2642
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Three-dimensional structures for micro-optical mechanical systems in standard CMOS
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Measurement of static friction in mechanical couplings of articulated microrobots
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Novel Force Transducer to Measure Contractile Characteristics from Isolated Heart Cells
Electrochemical Society |
6
Conference Proceedings
Fabrication of optomechanical structures suitable for microwave phase conjugation
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Heart cell contractions measured using a micromachined polysilicon force transducer
SPIE-The International Society for Optical Engineering |