Blank Cover Image

Monolithic multiple axis accelerometer design in standard CMOS

Author(s):
Publication title:
Micromachined Devices and Components
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2642
Pub. Year:
1995
Page(from):
95
Page(to):
102
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420084 [0819420085]
Language:
English
Call no.:
P63600/2642
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Multiaxis microcoil sensors in standard CMOS

Eyre,B., Pister,K.S.J., Gekelman,W.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings 3DｦﾌV:a MEMS 3D visualization package

Lo,N.R., Pister,K.S.J.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Three-dimensional structures for micro-optical mechanical systems in standard CMOS

Kruglick,E.J.J., Damle,S., Pister,K.S.J.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Fabrication of optomechanical structures suitable for microwave phase conjugation

Tsap,B., Pister,K.S.J., Fetterman,H.R.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings CMOS smart pixel for free-space optical communication

Leibowitz,B.S., Boser,B.E., Pister,K.S.J.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Optical communication link using a micromachined corner cube reflector

Chu,P.B., Lo,N.R., Berg,E., Pister,K.S.J.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Gas-phase silicon micromachining with xenon difluoride

Chang,F.I., Yeh,R., Lin,G., Chu,P.B., Hoffman,E.J., Kruglick,E.J.J., Pister,K.S.J., Hecht,M.H.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Optical methods for characterization of MEMS device motion

Nelson,P.R., Chu,P.B., Pister,K.S.J.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Measurement of static friction in mechanical couplings of articulated microrobots

Yeh,R., Pister,K.S.J.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings MEMS fixtures for handling and assembly of microparts

Tahhan,I.N., Zhuang,Y., Bobringer,K.F., Pister,K.S.J., Goldberg,K.Y.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings Process variation analysis for MEMS design

Schenato,L., Wu,W.-C., Ghaoui,L.El, Pister,K.S.J.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Novel Force Transducer to Measure Contractile Characteristics from Isolated Heart Cells

Lin, G., Pister, K.S.J., Roos, K.P.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12