Deposition of nanocrystalline metal films by cluster beams produced by a Pulsed Arc Cluster Ion Source

Deposition of nanocrystalline metal films by cluster beams produced by a Pulsed Arc Cluster Ion Source

Author(s):

Publication title:

Synthesis and properties of mechanically alloyed and nanocrystalline materials : ISMANAM-96 : proceedings of the International Symposium on Metastable, Mechanically Alloyed and Nanocrystalline Materials, Rome, Italy, May 20-24, 1996

Title of ser.:

Materials science forum

Ser. no.:

235-238

Pub. Year:

1997

Vol.:

Part1

Page(from):

267

Page(to):

272

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878497515 [087849751x]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00017904
Series ID:	PA00000012
Conf. info. (Name):	International Symposium on Metastable, Mechanically Alloyed and Nanocrystalline Materials : ISMANAM-96
Conf. info. (Number):	96 : 1996
Conf. info. (Venue):	Rome, Italy
Conf. info. (Date):	1996.05.20-1996.05.24

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