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Plasma characteristics related to thin-film microstructures in unbalanced magnetron sputtering processes

Author(s):
Rohde,S.L.  
Publication title:
Proceedings of the First ASM Heat Treatment and Surface Engineering Conference, in Europe, Pt. 1-2, held, May 22nd - 24th, 1991. in Amsterdam, The Netherlands
Title of ser.:
Materials science forum
Ser. no.:
102-104
Pub. Year:
1992
Vol.:
Pt.2
Page(from):
563
Page(to):
572
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496426 [0878496424]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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