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Characterization of BN Thin Films Deposited by Plasma CVD

Author(s):
Osaka,Y.
Chayahara,A.
Yokoyama,H.
Okamoto,M.
Hamada,T.
Imura,T.
Fujisawa,M.
2 more
Publication title:
Synthesis and properties of boron nitride
Title of ser.:
Materials science forum
Ser. no.:
54-55
Pub. date:
1990
Page(from):
277
Page(to):
294
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496068 [0878496068]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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