Hydrogen Diffusion and Passivation of Shallow Impurities in Crystalline Silicon

Author(s):

• Denteneer,P.J.H.
• Walle,C.G.Van de
• Bar-Yam,Y.
• Pantelides,S.T.

Publication title:

Proceedings of the 15th International Conference on Defects in Semiconductors : Budapest, Hungary, August 22-26, 1988

Title of ser.:

Materials science forum

Ser. no.:

38-41

Pub. Year:

1989

Vol.:

Part3

Page(from):

979

Page(to):

984

Pub. info.:

Aederlmannsdorf, Switzwelns: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878495849 [0878495843]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings