Yield enhancement in micromechanical sensor fabrication using statistical process control

Yield enhancement in micromechanical sensor fabrication using statistical process control

Author(s):

Borenstein,J.T. ( Charles Stark Draper Lab.,Inc. )
Preble,D.M. ( Charles Stark Draper Lab.,Inc. )

Publication title:

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3223

Pub. Year:

1997

Page(from):

276

Page(to):

283

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426550 [0819426555]

Language:

English

Call no.:

P63600/3223

Type:

Conference Proceedings

Details

TDL ID:	ZA00017865
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	1997 : 3rd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1997.09.29-1997.09.30

Similar Items:

1 Conference Proceedings Fabrication of integrated circuits with high yield using ultra-thin resist processes Peters, R.D., Postnikov, S.V., Cobb, J.L., Dakshina-Murthy, S., Stephens, T., Parker, C., Luckowski, E., Martinez, A.M. … SPIE-The International Society for Optical Engineering	7 Conference Proceedings Fabrication and characterization of a Fabry-Perot-based chemical sensor Han,J., Neikirk,D.P., Clevenger,M., McDevitt,J.T. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Fabrication of Electroplated Nickel Micromechanical Comb Resonators Ravokilde, J.T., Yalcinkaya, A.D., Johansen, L.S., Hansen, O. Electrochemical Society	8 Conference Proceedings Characterization of membrane curvature in micromachined silicon accelerometers and gyroscopes using optical interferometry Borenstein,J.T., Greiff,P., Sohn,J.B., Weinberg,M.S. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Utilizing effective statistical process control limits for critical dimension metrology Buser, J.T. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Fabrication of reflective micromirror in micromechanical optical switches Dong, W., Chen, W.Y., Yang, H., Zhang, L., Ji, P., Guo, W.B., Liu, C.X., Zhang, X.D., Sun, D.M., Jia, C.P., Pan, J.X. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Preliminary yield measurements in the ElectriCOIL system Carroll, D.L., Verdeyen, J.T., King, D.M., Benavides, G., Woodard, B.S., Richardson, N., Solomon, W.C., Rawlins, W.T., … SPIE - The International Society of Optical Engineering	10 Conference Proceedings Biomimetic fabrication of materials:the minimalist approach Lahiri,J., Xu,G., Lee,T., Dabbs,D.M., Yao,N., Aksay,I.A., Groves,J.T. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Design and Fabrication of a Constant Shear Microfluidic Network for Tissue Engineering Weinberg, E.J., Borenstein, J.T., Kaazempur-Mofrad, M.R., Orrick, B., Vacanti, J.P. Materials Research Society	11 Conference Proceedings Etch Selectivity of Novel Epitaxial Layers for Bulk Micromachining Borenstein, J.T., Gerrish, N.D., Currie, M.T., Fitzgerald, E.A. Materials Research Society
6 Conference Proceedings Materials inspection and process control using compensated laser ultrasound evaluation(CLUE):demonstration of a low-cost laser ultrasonic sensor Pepper,D.M., Dunning,G.J., Mitchell,P.V., McCahon,S.W., Klein,M.B., O'Meara,T.R. SPIE-The International Society for Optical Engineering	12 Conference Proceedings HYDROGEN DIFFUSION AND COMPLEX FORMATION IN SILICON Borenstein, J.T., Tulchinski, D., Corbett, J.W. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12