Design of bulk micromachined suspensions

Design of bulk micromachined suspensions

Author(s):: Fang,W. ( National Tsing Hua Univ.(Taiwan) )
Publication title:: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 3223
Pub. Year:: 1997
Page(from):: 262
Page(to):: 269
Pub. info.:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819426550 [0819426555]
Language:: English
Call no.:: P63600/3223
Type:: Conference Proceedings

Details

TDL ID:	ZA00017865
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	1997 : 3rd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1997.09.29-1997.09.30

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