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Macroporous silicon formation for micromachining

Author(s):
  • Ohji,H. ( Deift Univ.of Technology (Netherlands) )
  • Lahteenmaki,S. ( Helsinki Univ.of Technology (Finland) )
  • French,P.J. ( Delft Univ.of Technology (Netherlands) )
Publication title:
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3223
Pub. Year:
1997
Page(from):
189
Page(to):
197
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426550 [0819426555]
Language:
English
Call no.:
P63600/3223
Type:
Conference Proceedings

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