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New developments of process technologies for microfabrication

Author(s):
  • Piotter,V. ( Forschungszentrum Karlsruhe GmbH (FRG) )
  • Hanemann,T. ( Forschungszentrum Karlsruhe GmbH (FRG) )
  • Ruprecht,R. ( Forschungszentrum Karlsruhe GmbH (FRG) )
  • Thies,A. ( Forschungszentrum Karlsruhe GmbH (FRG) )
  • HouBelt,J.H. ( Forschungszentrum Karlsruhe GmbH (FRG) )
Publication title:
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3223
Pub. Year:
1997
Page(from):
91
Page(to):
99
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426550 [0819426555]
Language:
English
Call no.:
P63600/3223
Type:
Conference Proceedings

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