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New 3D surface profile measurement based on phase-shift interfering technology

Author(s):
  • Liu,B. ( Harbin Univ.of Science and Technology (China) )
  • Yang,L. ( Harbin Univ.of Science and Technology (China) )
  • Fan,J. ( Harbin Univ.of Science and Technology (China) )
  • Zhang,J. ( Harbin Univ.of Science and Technology (China) )
Publication title:
Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3275
Pub. Year:
1998
Page(from):
15
Page(to):
17
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427144 [0819427144]
Language:
English
Call no.:
P63600/3275
Type:
Conference Proceedings

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