New software algorithm of 3D surface profile measurement based on phase-shift interfering technology
- Author(s):
- Publication title:
- Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3275
- Pub. Year:
- 1998
- Page(from):
- 9
- Page(to):
- 14
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427144 [0819427144]
- Language:
- English
- Call no.:
- P63600/3275
- Type:
- Conference Proceedings
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