High-spectral-purity and high-durability kHz KrF excimer laser with advanced rf preionization discharge
- Author(s):
Enami,T. ( Komatsu Ltd. (Japan) ) Wakabayashi,O. ( Komatsu Ltd. (Japan) ) Nishisaka,T. ( Komatsu Ltd. (Japan) ) Suzuki,N. ( Komatsu Ltd. (Japan) ) Nire,T. ( Komatsu Ltd. (Japan) ) Mizoguchi,H. ( Komatsu Ltd. (Japan) ) Nakarai,H. ( Komatsu Ltd. (Japan) ) Tanaka,H. ( Komatsu Ltd. (Japan) ) Ariga,T. ( Komatsu Ltd. (Japan) ) Shio,K. ( Komatsu Ltd. (Japan) ) Okamoto,T. ( Komatsu Ltd. (Japan) ) Noudomi,R. ( Komatsu Ltd. (Japan) ) Tomaru,H. ( Komatsu Ltd. (Japan) ) Nakao,K. ( Komatsu Ltd. (Japan) ) - Publication title:
- Optical microlithography XI : 25-27 February 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3334
- Pub. Year:
- 1998
- Page(from):
- 1031
- Page(to):
- 1040
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427793 [0819427799]
- Language:
- English
- Call no.:
- P63600/3334
- Type:
- Conference Proceedings
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