Design of illumination system for ArF excimer laser step-and-scanner
- Author(s):
Lee,K.H. ( Electronics and Telecommunications Research Institute (Korea) ) Kim,D.H. ( Electronics and Telecommunications Research Institute (Korea) ) Kim,J.S. ( Electronics and Telecommunications Research Institute (Korea) ) Choi,S.-S. ( Electronics and Telecommunications Research Institute (Korea) ) Chung,H.B. ( Electronics and Telecommunications Research Institute (Korea) ) Yoo,H.J. ( Electronics and Telecommunications Research Institute (Korea) ) Kim,B.W. ( Electronics and Telecommunications Research Institute (Korea) ) - Publication title:
- Optical microlithography XI : 25-27 February 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3334
- Pub. Year:
- 1998
- Page(from):
- 997
- Page(to):
- 1004
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427793 [0819427799]
- Language:
- English
- Call no.:
- P63600/3334
- Type:
- Conference Proceedings
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