Metropole-3D: a rigorous 3D topography simulator
- Author(s):
- Li,X. ( Carnegie Mellon Univ. )
- Lucas,K.D. ( Motorola )
- Swecker,A.L. ( Carnegie Mellon Univ. )
- Strojwas,A.J. ( Carnegie Mellon Univ. )
- Publication title:
- Optical microlithography XI : 25-27 February 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3334
- Pub. Year:
- 1998
- Page(from):
- 717
- Page(to):
- 728
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427793 [0819427799]
- Language:
- English
- Call no.:
- P63600/3334
- Type:
- Conference Proceedings
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