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Practical approach to control the full-chip-level gate CD in DUV lithography

Author(s):
  • Park,C.-H. ( Samsung Electronics Co.,Ltd. (Korea) )
  • Kim,Y.-H. ( Samsung Electronics Co.,Ltd. (Korea) )
  • Lee,H.-J. ( Samsung Electronics Co.,Ltd. (Korea) )
  • Kong,J.-T. ( Samsung Electronics Co.,Ltd. (Korea) )
  • Lee,S.-H. ( Samsung Electronics Co.,Ltd. (Korea) )
Publication title:
Optical microlithography XI : 25-27 February 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3334
Pub. Year:
1998
Page(from):
215
Page(to):
223
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427793 [0819427799]
Language:
English
Call no.:
P63600/3334
Type:
Conference Proceedings

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