0.25-ヲフm logic manufacturability using practical 2D optical proximity correction
- Author(s):
Kling,M.E. ( Motorola ) Lucas,K.D. ( Motorola ) Reich,A. ( Motorola ) Roman,B.J. ( Motorola ) Chuang,H. ( Motorola ) Gilbert,P.V. ( Motorola ) Grobman,W.D. ( Motorola ) Travis,E.O. ( Motorola ) Tsui,P. ( Motorola ) Vuong,T. ( Motorola ) West,J.P. ( Motorola ) - Publication title:
- Optical microlithography XI : 25-27 February 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3334
- Pub. Year:
- 1998
- Page(from):
- 204
- Page(to):
- 214
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427793 [0819427799]
- Language:
- English
- Call no.:
- P63600/3334
- Type:
- Conference Proceedings
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