Blank Cover Image

0.25-ヲフm logic manufacturability using practical 2D optical proximity correction

Author(s):
Kling,M.E. ( Motorola )
Lucas,K.D. ( Motorola )
Reich,A. ( Motorola )
Roman,B.J. ( Motorola )
Chuang,H. ( Motorola )
Gilbert,P.V. ( Motorola )
Grobman,W.D. ( Motorola )
Travis,E.O. ( Motorola )
Tsui,P. ( Motorola )
Vuong,T. ( Motorola )
West,J.P. ( Motorola )
6 more
Publication title:
Optical microlithography XI : 25-27 February 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3334
Pub. date:
1998
Page(from):
204
Page(to):
214
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427793 [0819427799]
Language:
English
Call no.:
P63600/3334
Type:
Conference Proceedings

Similar Items:

Bhat,N., Chuang,H., Tsui,P., Woodruff,R., Grant,J., Kruth,R., Perera,A.H., Poon,S., Collins,S., Dyer,O., Misra,V., …

SPIE-The International Society for Optical Engineering

Beeck,M.Op de, Ronse,K., Ghandehari,K., Jaenen,P., Botermans,H., Finders,J., Lilygren,J.A., Baker,D.C., Vandenberghe,G., …

SPIE-The International Society for Optical Engineering

Sturtevant,J.L., Allgair,J., Fu,C.-C., Green,K.G., Hershey,R.R., Kling,M.E., Litt,L.C., Lucas,K.D., Roman,B.J., …

SPIE - The International Society for Optical Engineering

Kling,M.E., Cave,N., Falch,B.J., Fu,C.-C., Green,K.G., Lucas,K.D., Roman,B.J., Reich,A.J., Sturtevant,J.L., Tian,R., …

SPIE - The International Society for Optical Engineering

White,T.R., Kolar,D., Jahanbani,M., Frisa,L.E., Nagabushnam,R., Chuang,H., Tsui,P., Cope,J., Pulvirent,L., Bolton,S.

SPIE-The International Society for Optical Engineering

Lucas,K.D., Vasquez,J.A., Jain,A., Filipiak,S.M., Vuong,T., King,C.F., Roman,B.J.

SPIE-The International Society for Optical Engineering

Childs,K.D., Paul,D.F., Clough,S.P.

SPIE-The International Society for Optical Engineering

Farrell,T.R., Nunes,R., Campbell,R., Hoh,P., Samuels,D.J., Kirk,J.P., Conley,W.E., Iba,J., Shibata,T.

SPIE-The International Society for Optical Engineering

Lucas,K.D., McCallum,M., Falch,B.J., Wood,J.L., Kalk,F.D., Henderson,R.K., Russell,D.R.

SPIE - The International Society for Optical Engineering

Ackmann,P.W., Brown,S.E., Nistler,J.L., Spence,C.A.

SPIE-The International Society for Optical Engineering

Tritchkov,A., Rieger,M.L., Stirniman,J.P., Yen,A., Ronse,K., Vandenberghe,G., hove,L.Van den

SPIE-The International Society for Optical Engineering

Venkatraman, R., Jain, A., Farkas, J., Mendonca, J., Hamilton, G., Capasso, C., Denning, D., Simpson, C., Rogers, B., …

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12