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Effect of stage synchronization error of KrF scan on 0.18-ヲフm patterning

Author(s):
Uchiyama,T. ( NEC Corp. (Japan) )
Hashimoto,T. ( NEC Corp. (Japan) )
Fujimoto,M. ( NEC Corp. (Japan) )
Matsuura,S. ( NEC Corp. (Japan) )
Yamazaki,T. ( NEC Corp. (Japan) )
Kasama,K. ( NEC Corp. (Japan) )
1 more
Publication title:
Optical microlithography XI : 25-27 February 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3334
Pub. Year:
1998
Page(from):
67
Page(to):
76
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427793 [0819427799]
Language:
English
Call no.:
P63600/3334
Type:
Conference Proceedings

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