Effect of stage synchronization error of KrF scan on 0.18-ヲフm patterning
- Author(s):
Uchiyama,T. ( NEC Corp. (Japan) ) Hashimoto,T. ( NEC Corp. (Japan) ) Fujimoto,M. ( NEC Corp. (Japan) ) Matsuura,S. ( NEC Corp. (Japan) ) Yamazaki,T. ( NEC Corp. (Japan) ) Kasama,K. ( NEC Corp. (Japan) ) - Publication title:
- Optical microlithography XI : 25-27 February 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3334
- Pub. Year:
- 1998
- Page(from):
- 67
- Page(to):
- 76
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427793 [0819427799]
- Language:
- English
- Call no.:
- P63600/3334
- Type:
- Conference Proceedings
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