Monte Carlo computer simulation of ion sputtering

Monte Carlo computer simulation of ion sputtering

Author(s):

Zhurkin,E.E. ( St. Petersburg State Technical Univ.(Russia) )
Ivanov,D.P. ( St. Petersburg State Technical Univ.(Russia) )

Publication title:

International Workshop on New Approaches to High-Tech Materials, Nondestructive Testing and Computer Simulations in Materials Science and Engineering : 9-13 June 1997, St. Petersburg, Russia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3345

Pub. Year:

1998

Page(from):

252

Page(to):

259

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427922 [0819427926]

Language:

English

Call no.:

P63600/3345

Type:

Conference Proceedings

Details

TDL ID:	ZA00017854
Series ID:	PA00000029
Conf. info. (Name):	International Workshop on New Approaches to High-Tech Materials
Conf. info. (Number):	1997 : 1st
Conf. info. (Venue):	St. Petersburg, Russia
Conf. info. (Date):	1997.06.09-1997.06.13

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