Optical coupling analysis and vibration characterization for packaging of 2｡ﾟ2 MEMS vertical torsion mirror switches

Optical coupling analysis and vibration characterization for packaging of 2｡ﾟ2 MEMS vertical torsion mirror switches

Author(s):

Huang,L.-S. ( Univ.of California/Los Angeles )
Lee,S.-S. ( Univ.of California/Los Angeles )
Motamedi,M.E. ( Rockwell Science Ctr. )
Wu,M.C. ( Univ.of California/Los Angeles )
Kim,C.-J. ( Univ.of California/Los Angeles )

Publication title:

Microelectronic Structures and MEMS for Optical Processing IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3513

Pub. Year:

1998

Page(from):

135

Page(to):

143

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429728 [0819429724]

Language:

English

Call no.:

P63600/3513

Type:

Conference Proceedings

Details

TDL ID:	ZA00017845
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Microelectronic Stuctures and MEMS for Optical Processing
Conf. info. (Number):	1998 : 4th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.09.21-1998.09.22

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