Novel Concepts and Technologies for Manufacturing Optical Microdevices (Invited Paper)
- Author(s):
- Ehrfeld,W. ( (Germany) )
- Bauer,H.-D. ( (Germany) )
- Drews,D. ( (Germany) )
- Lacher,M. ( (Germany) )
- Publication title:
- OPTIKA '98, 14-17 September 1998, Budapest, Hungary
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3573
- Pub. Year:
- 1998
- Page(from):
- 442
- Page(to):
- 450
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430380 [0819430382]
- Language:
- English
- Call no.:
- P63600/3573
- Type:
- Conference Proceedings
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