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Silicidation by Rapid Thermal Processing

Author(s):
Publication title:
Reduced thermal processing for ULSI
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
207
Pub. Year:
1989
Page(from):
53
Page(to):
109
Pages:
57
Pub. info.:
New York: Plenum Press
ISBN:
9780306433825 [0306433826]
Language:
English
Call no.:
N11479/207
Type:
Conference Proceedings

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