Silicidation by Rapid Thermal Processing
- Author(s):
- Publication title:
- Reduced thermal processing for ULSI
- Title of ser.:
- NATO ASI series. Series B, Physics
- Ser. no.:
- 207
- Pub. Year:
- 1989
- Page(from):
- 53
- Page(to):
- 109
- Pages:
- 57
- Pub. info.:
- New York: Plenum Press
- ISBN:
- 9780306433825 [0306433826]
- Language:
- English
- Call no.:
- N11479/207
- Type:
- Conference Proceedings
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