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Pulsed-laser deposition of hydrogenated amorphous carbon films from a polymeric target

Author(s):
Publication title:
Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3933
Pub. Year:
2000
Page(from):
478
Page(to):
486
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435507 [0819435503]
Language:
English
Call no.:
P63600/3933
Type:
Conference Proceedings

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