Ion-source-assisted pulsed-laser deposition of carbon nitride thin films
- Author(s):
- Publication title:
- Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3933
- Pub. Year:
- 2000
- Page(from):
- 469
- Page(to):
- 477
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435507 [0819435503]
- Language:
- English
- Call no.:
- P63600/3933
- Type:
- Conference Proceedings
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