Pulsed-Laser deposition of AIN thin films
- Author(s):
Lu,Y.F. ( National Univ.of Singapore ) Ren,Z.M. Ni,H.Q. Goh,Y.W. Cheong,B.A. Chow,S.K. Wang,J.P. Chong,T.C. - Publication title:
- Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3933
- Pub. Year:
- 2000
- Page(from):
- 182
- Page(to):
- 189
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435507 [0819435503]
- Language:
- English
- Call no.:
- P63600/3933
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Properties of boron-carbon-nitrogen ternary thin films synthesized by pulsed laser deposition
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
2
Conference Proceedings
Influence of laser fluence and laser repetition rate on the synthesis of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
3
Conference Proceedings
Surface and optical properties of nanocrystalline GaN thin films on sapphire(OOO1)by pulsed laser deposition
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Influence Of Substrate Temperature On Barium Ferrite Films Prepared By Laser Deposition
Materials Research Society |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Surface analysis of TiN thin film deposited on silicon(100)by excimer laser
SPIE - The International Society for Optical Engineering |