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Pulsed-Laser deposition of AIN thin films

Author(s):
Lu,Y.F. ( National Univ.of Singapore )
Ren,Z.M.
Ni,H.Q.
Goh,Y.W.
Cheong,B.A.
Chow,S.K.
Wang,J.P.
Chong,T.C.
3 more
Publication title:
Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3933
Pub. date:
2000
Page(from):
182
Page(to):
189
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435507 [0819435503]
Language:
English
Call no.:
P63600/3933
Type:
Conference Proceedings

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